Balazs offer the most complete line of clean manufacturing solutions and analytical services
Balazs NanoAnalysis, a division of Air Liquide Electronics U.S. LP, operates ISO 17025 accredited laboratories that identify, analyze, and resolve contamination issues for semiconductor and other high-technology industries. Balazs provides a broad line of analytical services for water, air, chemicals, process gases, tool chamber components, wafers and films using techniques such as High Resolution ICP-MS, Laser Ablation ICP-MS, ICP-OES, GD-OES, XRF, IC, EDS, VPD (<450 mm), GC, GC-MS, TD-GC-MS, FTIR, Raman, 300 mm Wafer Outgassing, TGA, TMA, DSC and SEM. In addition we have a decade of experience performing onsite analysis projects relating to process tool exhaust characterization, abatement system qualification, and stack testing. Together with our industry experts we can identify and track contamination to their source; providing answers and solutions and not just analytical results. Balazs also offers advanced air and gas sampling services for monitoring cleanrooms and process tools, Gap Analysis, and Optima training.
Keywords: Analytical Services (UPW, Chemical, Air, Component)
Thin Film/Wafer Analysis
Material Characterization